Wednesday July 6, 2005
11 AM - 12:30 PM
ENG B-29

Office Hours:
Wednesday July 6, 2005
3:30 PM - 4:30 PM
ENG B-30

"Numerical Aperture Increasing Lens Microscopy: Applications in Si IC imaging and QD spectroscopy"
Prof. M. Selim Unlu
Boston University

This presentation will complement Dr. Ippolito's lecture on a detailed theoretical analysis of the numerical aperture increasing lens (NAIL) microscopy. I will focus on the practical applications in a variety of areas:

• Si IC inspection
• Thermal imaging
• Applications in semiconductor failure analysis
• Quantum dot spectroscopy

In addition to discusing the instruments and techniques in particular application area, I will also present advantages and disadvantages of NAIL microscopy for each application. I will use experimental results from our research to illustrate the benefits in improved resolution and enhanced light collection efficiency.

I will also discuss the practical aspects of fabrication and evaluation of NAILs.