Tuesday July 5, 2005
11 AM - 12:30 PM
ENG B-29

Office Hours:
Tuesday July 5, 2005
3:30 PM - 4 PM
ENG B-30

"MEMS Scanner Design"
Prof. Hakan Urey
Koc University

High-resolution and high-frequency MEMS scanners enable many real-time scanning display and imaging applications. MEMS scanner can be used as an enabling technology for various nano and micro optical and photonic sensor arrays. I will present mechanical and optical design considerations such as different vibration modes and dynamic mirror flatness issues for silicon microscanners. I’ll also discuss electrostatic and electromagnetic actuators and relative benefits of each and present the details of several MEMS-based sensor, display, and imaging systems developed at the Optical Microsystems Laboratory (http://mems.ku.edu.tr) with our collaborators.