Equipment

CNN Equipment

• Nanoprinter - BioForce Nanoenabler(PHO 503, Training, View Schedule)

Lab Manager: Dr. Mario Cabodi

Available Equipment

Klapperich Labs Shared Equipment

• Nanoindenter - Hysitron Triboscope (PHO B19, Training, Scheduling Policy, View Schedule)

• Atomic Force Microscope - Asylum MFP-3D (ERB 509, Training, View Schedule)

Lab Manager: Prof. Catherine Klapperich

Nanoscience Research Facility

Fabrication

• Scanning E-beam Writer JEOL JSX 6400: (Training,View Schedule)
  Fitted with the Deben beamblanker and Nabity NPGS System for e-beam writing with lateral resolution of 40 nm with the current tungsten filament configuration. Planned modifications in the future include the addition of a X-ray spectrometer, a low-temperature stage and a lanthanum-hexaboride (LAB6) filament configuration for sub-10-nm resolution e-beam writing.

• Mask Aligner - Karl-Suss MJB-3: (Training, View Schedule)
  Fitted with a UV light source for optical lithography down to a resolution of 5 microns. NRF also has a large collection of e-beam-written 4-inch masks, which include a variety of mesa structures.

• Surface Profilometer: - Dektak IIA:
  Enables thickness measurements down to 5-nm resolution.

• Optical Microscope - Zeiss x100
  

• Probe Station:
  Contains manual and automatic (robotic) control for electrical continuity checks. Fitted with a sensitive current source (Keithley 2400: 10 nA) and a high-frequency (1 MHz) LCR Meter (HP 4284A).

• K&S Wirebonder:
  The K&S 484 wirebonder is a mechanical wedge bonder. Fitted with an ultrasonic source, it enables wirebonding of gold and aluminum wires (down to 1 mil (25 micron) diameter) to thin electrical pads.

• Atomic Layer Deposition System: (Training, View Schedule )
  Savannah 100, Cambridge NanoTech

Materials Processing

Clean-Room with Laminar Flow Hood (For photo-resist, e-beam resist spinning)
Fume Hoods (2) For wet acid etches. (A third fume hood and two additional laminar flow hoods are also available for experiments requiring dedicated hood space).
Edwards Multi-Source Thermal Evaporator Vacuum thermal evaporator for multilayered materials deposition.
High-Purity Thermal Evaporator with Plasma Stripper Homemade Ultra-Pure Thermal Evaporator (for use of 5N gold only), fitted with a home-built in situ plasma cleaner.
Headway Research Spinner For use of e-beam and photoresists.
Multiple Thermodyne Ovens and Ultrasound Cleaners
OAI UV light source for exposure and stripping
Lindberg Tube Furnace (1200^o C)
Pelco CPD2 Critical Point Dryer
Home-Built Nitrite/Oxide Sputtering System (not yet completed)
Home-Built Reactive Ion Etch (RIE) System (not yet completed)

Lab Manager: Prof. Raj Mohanty

BME Core Facilities

Micro/Nano Biosystems Fabrication Facilities

Lab Manager: Dr. Ze'ev Feit

Biointerface Technologies Facilities

Lab Manager: Dr. Xin Brown

Micro/Nano Imaging

Lab Manager: Dr. Phil Allen

Whitaker BioMEMS Facility

Class 1000 Clean Room (ERB 712)

Plasma Asher (Oxygen, Argon)
Mask Aligner MA6/BA6 (Suss - 3", 4" wafers)
Ellipsometer (Automatic, 3 wavelengths- Rudolph)
Spinner with 2 Hot Plates (Suss, Delta80 T3)
E-Beam evaporator (Sharon Vacuum, Telemark e-Beamx2 Guns)
PECVD (Oerlikon 790 for low stress growth of SiO2, Si3N4)
Salare wet laminar flow Chemical hood with Sunk in baths (3 Acid, Bases/Developers, 3 solvent, 1 Dump rinse, 1 Ultrasonic)
Semitool Rinse/Dryer (for 3", 4" wafers)

Class 100 Clean Room (ERB 718)

MJB3 Mask Aligner (Suss, 3" wafers)
Dektak 8 Profiler
Zeiss Microscope
SPI Barrel Asher (Small)
Programmable Spinner (+ 2 Hot plates in 8' chemical Hood)
Wet Hood (8')

Lab Managers: Dr. Ze'ev Feit, Prof. Amit Meller

Precision Measurement Laboratory (Schedule)

Materials Property Characterization Equipment

Scanning Electron Microscope (Schedule) JEOL JSM-6100
Energy Dispersive X-Ray Spectrometer Oxford ISIS
Cathode Luminescence Detection System Gatan MonoCL2


Surface Morphology Characterization Equipment

Field Emission Scanning Electron Microscope Zeiss SUPRA 40VP
Scanning Probe Atomic Force Microscope Digital Instruments (VEECO) Dimension 3100
PicoForce Scanning Probe Microscope VEECO Metrology PicoForce

Lab Manager: Ms. Anlee Krupp

Optoelectronic Processing Facility (Schedule)

Class 100 Photolithography Cleanroom

Photoresist Spinner Hood Headway Research CB-15
Spinner/Hotplate System Karl Suss Delta 80T2
Mask Aligner Karl Suss MJB3
Mask Aligner Karl Suss MA6
Microscope (with video) Nikon Optiphot 150S
Stereo Microscope (with video) Nikon SMZ-800
Microscope (with video, Nomarski) Leitz Metalloplan

Thin Film Deposition and Analysis Equipment

Thermal Evaporator BOC Edwards Auto 306
Electron Beam Evaporator BOC Edwards Auto 306
Ion Beam Assisted Deposition Commonwealth Scientific 1160
Thermal Oxide Furnace MRL Industries HT 1012
DC/RF Magnetron Sputter Denton Vacuum Discovery 18
Electron Beam Evaporator Sharon Vacuum Custom Design
Rapid Thermal Processor Modular Process Technology 600S
Ellipsometer Rudolph Auto EL-II
Surface Profiler KLA Tencor Alpha-Step 500

Plasma Etching and Cleaning

Reactive Ion Etcher Plasma-Therm 790
Plasma Asher PVA TePla America M4L
Deep Reactive Ion Etcher Surface Technology Systems ASE HRM
Chemical Hood
O2 Plasma Asher March Plasmod
O2 Plasma Barrel Etcher Branson PM-1820

Wirebonding and Electrical Testing

Ball Bonder Kulicke & Soffa 4124
Wedge Bonder Kulicke & Soffa 4523
Probe Station Kark Suss PM5
Semiconductor Parameter Analyzer HP 4155A
Precision LCR Meter HP 4284A
4 Point Probe Cascade Microtech CPS-05

Post Processing Equipment

Manual Scriber Karl Suss HR100
Stereo Microscope Nikon SMZ-800
Microscope Leitx Metalloplan
Dicing Saw Dicing Technology Basic-Dice II

Lab Manager: Mr. Paul Mak

Integrated Optics Laboratory (Schedule)

Class 100 Photolithography Cleanroom
Bonding Equipment
Alignment Stations
Curing Stations
Test Equipment
Spectroscopy Equipment

Lab Manager: Dr. Helen Fawcett